| SDV120, SDV200, SDV320, SDV430,
SDV800 |
- Chemical and Pharmaceutical Processing
- Solvent Recovery
- Forming
- Crystallization
- Dry Etching
- Sputtering
- Vapor Recovery
|
- Patented variable pitch rotor design reduces power consumption
by up to 30% as compared to fixed pitch designs
-
No oil or water in contact with process gases
-
No metal-to-metal contact between operating parts
-
Simple, robust design can handle process by-products – liquids, condensate, and even small
particles
- Flows: 71 - 750 CFM (120 - 440 m³/h)
- Full pumping speed to 1 Torr (1.3 mbar abs); ultimate pressures
to 0.02 Torr (2.7 Pa)
-
Space saving C-face motor design eliminates need for
motor coupling and guard
-
Short gas path through the pump for quick discharge
-
Quiet operation – less than 85 dB(A)
|
